@misc{indiciaea076f354a01a,
  title = {Capacitive micromachined ultrasonic Lamb wave transducers using rectangular membranes.},
  author = {Mohammed H Badi and Goksen G Yaralioglu and A Sanli Ergun and Sean T Hansen and Eehern J Wong and Butrus T Khuri-Yakub},
  year = {2003},
  doi = {10.1109/tuffc.2003.1235330},
  url = {https://pubmed.ncbi.nlm.nih.gov/14561035/},
  note = {Source identifier: 14561035}
}