TY  - RPRT
TI  - Capacitive micromachined ultrasonic Lamb wave transducers using rectangular membranes.
AU  - Mohammed H Badi
AU  - Goksen G Yaralioglu
AU  - A Sanli Ergun
AU  - Sean T Hansen
AU  - Eehern J Wong
AU  - Butrus T Khuri-Yakub
PY  - 2003
DO  - 10.1109/tuffc.2003.1235330
UR  - https://pubmed.ncbi.nlm.nih.gov/14561035/
ID  - 14561035
ER  -