@misc{indiciaefec07ccaea47,
  title = {Atomic layer deposition chemistry: recent developments and future challenges.},
  author = {Markku Leskelä and Mikko Ritala},
  year = {2003},
  doi = {10.1002/anie.200301652},
  url = {https://pubmed.ncbi.nlm.nih.gov/14639717/},
  note = {Source identifier: 14639717}
}