TY  - RPRT
TI  - Atomic layer deposition chemistry: recent developments and future challenges.
AU  - Markku Leskelä
AU  - Mikko Ritala
PY  - 2003
DO  - 10.1002/anie.200301652
UR  - https://pubmed.ncbi.nlm.nih.gov/14639717/
ID  - 14639717
ER  -