@misc{indiciaeb0a88ca101b9, title = {SAW COM-parameter extraction in AlN/diamond layered structures.}, author = {Gonzalo F Iriarte and Fredrik Engelmark and Ilia V Katardjiev and Viktor Plessky and Ventsislav Yantchev}, year = {2003}, doi = {10.1109/tuffc.2003.1251137}, url = {https://pubmed.ncbi.nlm.nih.gov/14682637/}, note = {Source identifier: 14682637} }