@misc{indiciae8f397d99f535, title = {A new patterning method using photocatalytic lithography and selective atomic layer deposition.}, author = {Jae P Lee and Myung M Sung}, year = {2004}, doi = {10.1021/ja038769+}, url = {https://pubmed.ncbi.nlm.nih.gov/14709043/}, note = {Source identifier: 14709043} }