TY  - RPRT
TI  - A new patterning method using photocatalytic lithography and selective atomic layer deposition.
AU  - Jae P Lee
AU  - Myung M Sung
PY  - 2004
DO  - 10.1021/ja038769+
UR  - https://pubmed.ncbi.nlm.nih.gov/14709043/
ID  - 14709043
ER  -