@misc{indiciaea20cf5c55c5a,
  title = {Scanning secondary ion analytical microscopy with parallel detection.},
  author = {G Slodzian and B Daigne and F Girard and F Boust and F Hillion},
  year = {1992},
  doi = {10.1016/0248-4900(92)90007-n},
  url = {https://pubmed.ncbi.nlm.nih.gov/1511246/},
  note = {Source identifier: 1511246}
}