@misc{indiciaeb83e38d3e506,
  title = {FIB-induced damage in silicon.},
  author = {S Rubanov and P R Munroe},
  year = {2004},
  doi = {10.1111/j.0022-2720.2004.01327.x},
  url = {https://pubmed.ncbi.nlm.nih.gov/15157189/},
  note = {Source identifier: 15157189}
}