TY  - RPRT
TI  - FIB-induced damage in silicon.
AU  - S Rubanov
AU  - P R Munroe
PY  - 2004
DO  - 10.1111/j.0022-2720.2004.01327.x
UR  - https://pubmed.ncbi.nlm.nih.gov/15157189/
ID  - 15157189
ER  -