@misc{indiciaedd2533d53d3a,
  title = {Colloidal lithographic nanopatterning via reactive ion etching.},
  author = {Dae-Geun Choi and Hyung Kyun Yu and Se Gyu Jang and Seung-Man Yang},
  year = {2004},
  doi = {10.1021/ja0319083},
  url = {https://pubmed.ncbi.nlm.nih.gov/15174872/},
  note = {Source identifier: 15174872}
}