@misc{indiciae6d0f1e5757e5, title = {Miniature lamellar grating interferometer based on silicon technology.}, author = {Omar Manzardo and Roland Michaely and Felix Schädelin and Wilfried Noell and Thomas Overstolz and Nico De Rooij and Hans Peter Herzig}, year = {2004}, doi = {10.1364/ol.29.001437}, url = {https://pubmed.ncbi.nlm.nih.gov/15259705/}, note = {Source identifier: 15259705} }