TY - RPRT TI - Miniature lamellar grating interferometer based on silicon technology. AU - Omar Manzardo AU - Roland Michaely AU - Felix Schädelin AU - Wilfried Noell AU - Thomas Overstolz AU - Nico De Rooij AU - Hans Peter Herzig PY - 2004 DO - 10.1364/ol.29.001437 UR - https://pubmed.ncbi.nlm.nih.gov/15259705/ ID - 15259705 ER -