@misc{indiciae76f91e7e1e23,
  title = {High-performance EUV/soft X-ray ellipsometry system using multilayer mirrors.},
  author = {T Kawamura and J J Delaunay and H Takenaka and T Hayashi and Y Watanabe},
  year = {1998},
  doi = {10.1107/s0909049597015276},
  url = {https://pubmed.ncbi.nlm.nih.gov/15263636/},
  note = {Source identifier: 15263636}
}