TY  - RPRT
TI  - High-performance EUV/soft X-ray ellipsometry system using multilayer mirrors.
AU  - T Kawamura
AU  - J J Delaunay
AU  - H Takenaka
AU  - T Hayashi
AU  - Y Watanabe
PY  - 1998
DO  - 10.1107/s0909049597015276
UR  - https://pubmed.ncbi.nlm.nih.gov/15263636/
ID  - 15263636
ER  -