@misc{indiciae902741f11de8,
  title = {Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam.},
  author = {Ryo Shinozaki and Osami Sasaki and Takamasa Suzuki},
  year = {2004},
  doi = {10.1364/ao.43.004157},
  url = {https://pubmed.ncbi.nlm.nih.gov/15291058/},
  note = {Source identifier: 15291058}
}