TY  - RPRT
TI  - Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam.
AU  - Ryo Shinozaki
AU  - Osami Sasaki
AU  - Takamasa Suzuki
PY  - 2004
DO  - 10.1364/ao.43.004157
UR  - https://pubmed.ncbi.nlm.nih.gov/15291058/
ID  - 15291058
ER  -