@misc{indiciae4c81af14aba7,
  title = {Sputter-depth profiling for thin-film analysis.},
  author = {S Hofmann},
  year = {2004},
  doi = {10.1098/rsta.2003.1304},
  url = {https://pubmed.ncbi.nlm.nih.gov/15306276/},
  note = {Source identifier: 15306276}
}