TY  - RPRT
TI  - Compensator thickness verification using an a-Si EPID.
AU  - Geetha V Menon
AU  - Ron S Sloboda
PY  - 2004
DO  - 10.1118/1.1767694
UR  - https://pubmed.ncbi.nlm.nih.gov/15377097/
ID  - 15377097
ER  -