@misc{indiciae5878b49c2311,
  title = {Layer-by-layer design method for multilayers with barrier layers: application to Si/Mo multilayers for extreme-ultraviolet lithography.},
  author = {Juan I Larruquert},
  year = {2004},
  doi = {10.1364/josaa.21.001750},
  url = {https://pubmed.ncbi.nlm.nih.gov/15384442/},
  note = {Source identifier: 15384442}
}