@misc{indiciae09b59381eff7,
  title = {Surface micromachined electrostatically actuated micro peristaltic pump.},
  author = {Jun Xie and Jason Shih and Qiao Lin and Bozhi Yang and Yu-Chong Tai},
  year = {2004},
  doi = {10.1039/b403906h},
  url = {https://pubmed.ncbi.nlm.nih.gov/15472734/},
  note = {Source identifier: 15472734}
}