@misc{indiciae1a6478e03b0a,
  title = {Composition and stress analysis in Si structures using micro-raman spectroscopy.},
  author = {J McCarthy and S Bhattacharya and T S Perova and R A Moore and H Gamble and B M Armstrong},
  doi = {10.1002/sca.4950260504},
  url = {https://pubmed.ncbi.nlm.nih.gov/15536979/},
  note = {Source identifier: 15536979}
}