TY  - RPRT
TI  - Composition and stress analysis in Si structures using micro-raman spectroscopy.
AU  - J McCarthy
AU  - S Bhattacharya
AU  - T S Perova
AU  - R A Moore
AU  - H Gamble
AU  - B M Armstrong
DO  - 10.1002/sca.4950260504
UR  - https://pubmed.ncbi.nlm.nih.gov/15536979/
ID  - 15536979
ER  -