@misc{indiciae0182f12265e9,
  title = {Single-chip mechatronic microsystem for surface imaging and force response studies.},
  author = {Sadik Hafizovic and Diego Barrettino and Tormod Volden and Jan Sedivy and Kay-Uwe Kirstein and Oliver Brand and Andreas Hierlemann},
  year = {2004},
  doi = {10.1073/pnas.0405725101},
  url = {https://pubmed.ncbi.nlm.nih.gov/15569945/},
  note = {Source identifier: 15569945}
}