@misc{indiciae0c72d5c7dd98,
  title = {A simple electron-beam lithography system.},
  author = {Kristian Mølhave and Dorte Nørgaard Madsen and Peter Bøggild},
  year = {2005},
  doi = {10.1016/j.ultramic.2004.09.011},
  url = {https://pubmed.ncbi.nlm.nih.gov/15639352/},
  note = {Source identifier: 15639352}
}