@misc{indiciae295e92d9b5d4,
  title = {Nanofabrication with atomic force microscopy.},
  author = {Qian Tang and San-Qiang Shi and Limin Zhou},
  year = {2004},
  doi = {10.1166/jnn.2004.131},
  url = {https://pubmed.ncbi.nlm.nih.gov/15656185/},
  note = {Source identifier: 15656185}
}