@misc{indiciaea0c1db85a37a, title = {Photon-sieve lithography.}, author = {Rajesh Menon and Dario Gil and George Barbastathis and Henry I Smith}, year = {2005}, doi = {10.1364/josaa.22.000342}, url = {https://pubmed.ncbi.nlm.nih.gov/15717565/}, note = {Source identifier: 15717565} }