@misc{indiciae90546aaf258b,
  title = {Electrostatic force-assisted nanoimprint lithography (EFAN).},
  author = {Xiaogan Liang and Wei Zhang and Mingtao Li and Qiangfei Xia and Wei Wu and Haixiong Ge and Xinyu Huang and Stephen Y Chou},
  year = {2005},
  doi = {10.1021/nl0480161},
  url = {https://pubmed.ncbi.nlm.nih.gov/15755108/},
  note = {Source identifier: 15755108}
}