@misc{indiciae7e2a8732cff5,
  title = {[Biochip micromachining technology adopting laser technology].},
  author = {Yu Zhang and Shengqi Wang and Tiechuan Zuo and Tao Chen},
  year = {2005},
  url = {https://pubmed.ncbi.nlm.nih.gov/15762140/},
  note = {Source identifier: 15762140}
}