TY  - RPRT
TI  - [Biochip micromachining technology adopting laser technology].
AU  - Yu Zhang
AU  - Shengqi Wang
AU  - Tiechuan Zuo
AU  - Tao Chen
PY  - 2005
UR  - https://pubmed.ncbi.nlm.nih.gov/15762140/
ID  - 15762140
ER  -