@misc{indiciae6e8d5726c3b5,
  title = {Versatile micromirror with a multimovement mode.},
  author = {Hongbin Yu and Haiqing Chen and Sai Fu},
  year = {2005},
  doi = {10.1364/ao.44.001178},
  url = {https://pubmed.ncbi.nlm.nih.gov/15765696/},
  note = {Source identifier: 15765696}
}