@misc{indiciae7f68f5d66473,
  title = {Silicon microlens structures fabricated by scanning-probe gray-scale oxidation.},
  author = {C F Chen and S D Tzeng and H Y Chen and S Gwo},
  year = {2005},
  doi = {10.1364/ol.30.000652},
  url = {https://pubmed.ncbi.nlm.nih.gov/15792006/},
  note = {Source identifier: 15792006}
}