TY  - RPRT
TI  - Silicon microlens structures fabricated by scanning-probe gray-scale oxidation.
AU  - C F Chen
AU  - S D Tzeng
AU  - H Y Chen
AU  - S Gwo
PY  - 2005
DO  - 10.1364/ol.30.000652
UR  - https://pubmed.ncbi.nlm.nih.gov/15792006/
ID  - 15792006
ER  -