@misc{indiciaeeafbe3c8c651, title = {Two-dimensional thickness measurements based on internal reflection ellipsometry.}, author = {Soichi Otsuki and Kaoru Tamada and Shin-ichi Wakida}, year = {2005}, doi = {10.1364/ao.44.001410}, url = {https://pubmed.ncbi.nlm.nih.gov/15796239/}, note = {Source identifier: 15796239} }