TY  - RPRT
TI  - Two-dimensional thickness measurements based on internal reflection ellipsometry.
AU  - Soichi Otsuki
AU  - Kaoru Tamada
AU  - Shin-ichi Wakida
PY  - 2005
DO  - 10.1364/ao.44.001410
UR  - https://pubmed.ncbi.nlm.nih.gov/15796239/
ID  - 15796239
ER  -