@misc{indiciae105850e6ca72,
  title = {Sub-100 nm patterning with an amorphous fluoropolymer mold.},
  author = {Dahl-Young Khang and Hong H Lee},
  year = {2004},
  doi = {10.1021/la0358668},
  url = {https://pubmed.ncbi.nlm.nih.gov/15835708/},
  note = {Source identifier: 15835708}
}