@misc{indiciae9de617d12231,
  title = {Micrometre-scale silicon electro-optic modulator.},
  author = {Qianfan Xu and Bradley Schmidt and Sameer Pradhan and Michal Lipson},
  year = {2005},
  doi = {10.1038/nature03569},
  url = {https://pubmed.ncbi.nlm.nih.gov/15902253/},
  note = {Source identifier: 15902253}
}