@misc{indiciaeb1a3b9d2297c, title = {Complex oscillations and chaos in electrostatic microelectromechanical systems under superharmonic excitations.}, author = {Sudipto K De and N R Aluru}, year = {2005}, doi = {10.1103/physrevlett.94.204101}, url = {https://pubmed.ncbi.nlm.nih.gov/16090253/}, note = {Source identifier: 16090253} }