TY - RPRT TI - Complex oscillations and chaos in electrostatic microelectromechanical systems under superharmonic excitations. AU - Sudipto K De AU - N R Aluru PY - 2005 DO - 10.1103/physrevlett.94.204101 UR - https://pubmed.ncbi.nlm.nih.gov/16090253/ ID - 16090253 ER -