@misc{indiciae9f8965b41497,
  title = {Thickness measurements on transparent substrates based on reflection ellipsometry. I. Optical effects of high-refractive-index additional layers.},
  author = {Soichi Otsuki and Koji Ohta and Kaoru Tamada and Shin-ichi Wakida},
  year = {2005},
  doi = {10.1364/ao.44.005910},
  url = {https://pubmed.ncbi.nlm.nih.gov/16231798/},
  note = {Source identifier: 16231798}
}