TY  - RPRT
TI  - Thickness measurements on transparent substrates based on reflection ellipsometry. I. Optical effects of high-refractive-index additional layers.
AU  - Soichi Otsuki
AU  - Koji Ohta
AU  - Kaoru Tamada
AU  - Shin-ichi Wakida
PY  - 2005
DO  - 10.1364/ao.44.005910
UR  - https://pubmed.ncbi.nlm.nih.gov/16231798/
ID  - 16231798
ER  -