@misc{indiciae4b4c0e1d4029,
  title = {High-temperature stability multilayers for extreme-ultraviolet condenser optics.},
  author = {Sasa Bajt and Daniel G Stearns},
  year = {2005},
  doi = {10.1364/ao.44.007735},
  url = {https://pubmed.ncbi.nlm.nih.gov/16381520/},
  note = {Source identifier: 16381520}
}