TY  - RPRT
TI  - High-temperature stability multilayers for extreme-ultraviolet condenser optics.
AU  - Sasa Bajt
AU  - Daniel G Stearns
PY  - 2005
DO  - 10.1364/ao.44.007735
UR  - https://pubmed.ncbi.nlm.nih.gov/16381520/
ID  - 16381520
ER  -