@misc{indiciae734faf017bd9,
  title = {Light coupling into an optical microcantilever by an embedded diffraction grating.},
  author = {K Zinoviev and C Dominguez and J A Plaza and V Cadarso and L M Lechuga},
  year = {2006},
  doi = {10.1364/ao.45.000229},
  url = {https://pubmed.ncbi.nlm.nih.gov/16422154/},
  note = {Source identifier: 16422154}
}