TY - RPRT TI - Light coupling into an optical microcantilever by an embedded diffraction grating. AU - K Zinoviev AU - C Dominguez AU - J A Plaza AU - V Cadarso AU - L M Lechuga PY - 2006 DO - 10.1364/ao.45.000229 UR - https://pubmed.ncbi.nlm.nih.gov/16422154/ ID - 16422154 ER -