@misc{indiciaec4e9ca12f79f, title = {Nitrogen diffusion in amorphous silicon nitride isotope multilayers probed by neutron reflectometry.}, author = {H Schmidt and M Gupta and M Bruns}, year = {2006}, doi = {10.1103/physrevlett.96.055901}, url = {https://pubmed.ncbi.nlm.nih.gov/16486954/}, note = {Source identifier: 16486954} }