TY - RPRT TI - Nitrogen diffusion in amorphous silicon nitride isotope multilayers probed by neutron reflectometry. AU - H Schmidt AU - M Gupta AU - M Bruns PY - 2006 DO - 10.1103/physrevlett.96.055901 UR - https://pubmed.ncbi.nlm.nih.gov/16486954/ ID - 16486954 ER -