@misc{indiciaefc56fd8113ce,
  title = {Introduction to microfabrication techniques.},
  author = {Rabih Zaouk and Benjamin Y Park and Marc J Madou},
  year = {2006},
  doi = {10.1385/1-59259-997-4:3},
  url = {https://pubmed.ncbi.nlm.nih.gov/16508060/},
  note = {Source identifier: 16508060}
}