@misc{indiciaeba0c75ac3156,
  title = {Optically driven microelectromechanical-system deformable mirror under high-frequency AC bias.},
  author = {J Khoury and A Drehman and C L Woods and B Haji-Saeed and S K Sengupta and W Goodhue and J Kierstead},
  year = {2006},
  doi = {10.1364/ol.31.000808},
  url = {https://pubmed.ncbi.nlm.nih.gov/16544631/},
  note = {Source identifier: 16544631}
}