TY  - RPRT
TI  - Optically driven microelectromechanical-system deformable mirror under high-frequency AC bias.
AU  - J Khoury
AU  - A Drehman
AU  - C L Woods
AU  - B Haji-Saeed
AU  - S K Sengupta
AU  - W Goodhue
AU  - J Kierstead
PY  - 2006
DO  - 10.1364/ol.31.000808
UR  - https://pubmed.ncbi.nlm.nih.gov/16544631/
ID  - 16544631
ER  -